JP Patent

JP5294681B2 — 基板処理装置及びその基板搬送方法

Assigned to Tokyo Electron Ltd · Expires 2013-09-18 · 13y expired

What this patent protects

Patent listed against patiromer-sorbitex-calcium.

Drugs covered by this patent

Patent Metadata

Patent number
JP5294681B2
Jurisdiction
JP
Classification
Expires
2013-09-18
Drug substance claim
No
Drug product claim
No
Assignee
Tokyo Electron Ltd
Source
FDA Orange Book + USPTO grounding via Google Patents

Bibliographic data sourced from FDA Orange Book + USPTO public records. Plain-English summary generated by AI grounded in source text. Patent term extensions (PTR, SPC, pediatric) may shift the effective expiry. Not legal advice.

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