JP Patent
JP5294681B2 — 基板処理装置及びその基板搬送方法
Assigned to Tokyo Electron Ltd · Expires 2013-09-18 · 13y expired
What this patent protects
Patent listed against patiromer-sorbitex-calcium.
Drugs covered by this patent
Bibliographic data sourced from FDA Orange Book + USPTO public records. Plain-English summary generated by AI grounded in source text. Patent term extensions (PTR, SPC, pediatric) may shift the effective expiry. Not legal advice.
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