CN Patent

CN116636144A — 离子电流下降补偿

Assigned to Eagle Harbor Technologies Inc · Expires 2023-08-22 · 3y expired

What this patent protects

公开了脉冲发生器。脉冲发生器包括直流电源；多个开关，变压器；和脉冲输出。脉冲发生器可以与等离子体室耦合。脉冲输出输出高压脉冲，该高压脉冲具有大于1kV的峰间电压和连续高压双极性脉冲之间的电压部分，该电压部分具有负斜率，该负斜率大大抵消了等离子室内晶圆上由于离子电流而降低的电压。晶圆处得到的电压在连续脉冲之间可能基本平坦。

USPTO Abstract

公开了脉冲发生器。脉冲发生器包括直流电源；多个开关，变压器；和脉冲输出。脉冲发生器可以与等离子体室耦合。脉冲输出输出高压脉冲，该高压脉冲具有大于1kV的峰间电压和连续高压双极性脉冲之间的电压部分，该电压部分具有负斜率，该负斜率大大抵消了等离子室内晶圆上由于离子电流而降低的电压。晶圆处得到的电压在连续脉冲之间可能基本平坦。

Drugs covered by this patent

Patent Metadata

Patent number
CN116636144A
Jurisdiction
CN
Classification
—
Expires
2023-08-22
Drug substance claim
No
Drug product claim
No
Assignee
Eagle Harbor Technologies Inc
Source
FDA Orange Book + USPTO grounding via Google Patents

Bibliographic data sourced from FDA Orange Book + USPTO public records. Plain-English summary generated by AI grounded in source text. Patent term extensions (PTR, SPC, pediatric) may shift the effective expiry. Not legal advice.

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