CN Patent

CN1138020C — 阴极电弧蒸镀方式淀积类金刚石碳膜的制备方法

Assigned to Yongyuan Technology Co ltd · Expires 2004-02-11 · 22y expired

What this patent protects

本发明采用阴极电弧蒸镀方式淀积类金刚石碳膜的制备方法，是利用CAE金属离子的高离子能量激发真空室中烃类气体的裂解反应而淀积高硬度、高润滑性的类金刚石碳膜，该碳膜由于内含金属成分而具有良好的韧性，另外淀积类金刚石碳膜之前可借助于同一金属弧源以CAE制备工艺先淀积一层或多层的金属、金属氮化物或金属碳化物中介层以强化类金刚石碳膜的附着性，再通过烃类气体与金属弧源等离子体产生烃类气体的裂解反应而淀积类金刚石碳膜。

USPTO Abstract

本发明采用阴极电弧蒸镀方式淀积类金刚石碳膜的制备方法，是利用CAE金属离子的高离子能量激发真空室中烃类气体的裂解反应而淀积高硬度、高润滑性的类金刚石碳膜，该碳膜由于内含金属成分而具有良好的韧性，另外淀积类金刚石碳膜之前可借助于同一金属弧源以CAE制备工艺先淀积一层或多层的金属、金属氮化物或金属碳化物中介层以强化类金刚石碳膜的附着性，再通过烃类气体与金属弧源等离子体产生烃类气体的裂解反应而淀积类金刚石碳膜。

Drugs covered by this patent

Patent Metadata

Patent number
CN1138020C
Jurisdiction
CN
Classification
—
Expires
2004-02-11
Drug substance claim
No
Drug product claim
No
Assignee
Yongyuan Technology Co ltd
Source
FDA Orange Book + USPTO grounding via Google Patents

Bibliographic data sourced from FDA Orange Book + USPTO public records. Plain-English summary generated by AI grounded in source text. Patent term extensions (PTR, SPC, pediatric) may shift the effective expiry. Not legal advice.

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